Abstract
The results of the inverse scattering theory are employed to develop a Newton-Kantorovitch type iterative algorithm for the profile reconstruction of the complex dielectric constant of an inhomogeneous layer from the ellipsometric data. The method estimates simultaneously profiles of both parts of the complex dielectric constant and could be applied to characterization of a single inhomogeneous surface layer and to an inhomogeneous layer embedded in a given stratified structure. The presented algorithm performs experimental data fitting in the functional space, that requires inverting of Fredholm integral equations and applying an appropriate regularization scheme. The practical usefulness and effectiveness of the algorithm is demonstrated by numerical examples with simulated data for different kinds of profiles and materials.
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