Inverse Hysteresis Compensation of One-Dimensional Piezoelectric Scanner with Generalized Prandtl-Ishlinskii Model

Abstract

Laser scanner is one of the key components in laser radar, adaptive optics, space optical communications and other fields, which can achieve precise control of the laser beam deflection or scanning. Due to the high precision, high bandwidth and small momentum of inertia, piezoelectric scanner has been widely developed in recent years. It’s necessary to design hysteresis compensation algorithm because the hysteresis effect of piezoelectric ceramics will affect the scanning accuracy of one-dimensional piezoelectric scanner. In the paper, we firstly establish an inverse hysteresis model based on the generalized Prandtl-Ishlinskii model which describes properties of the piezoelectric ceramic, then use particle swarm algorithm to identify the parameters of inverse hysteresis model, obtaining a triangular wave signal with inverse hysteresis to drive one-dimensional piezoelectric scanner. Experimental results show that the scanning nonlinearity is improved from 3.5% to less than 1% after driven by triangular wave votlage within 50Hz, the scanning accuracy of one-dimensional piezoelectric scanner is improved effectively.