Abstract
Topography development is one of the main factors limiting the quality of depth profiles during depth profiling experiments. One possible source of topography development is the formation of self-organized patterns due to cluster ion beam irradiation. In this work, we propose a simple model that can intuitively explain this phenomenon in terms of impact-induced mass transfer. By coupling our model with molecular dynamics simulations, we can predict the critical incidence angle, which separates the smoothening and roughening regimes. The results are in quantitative agreement with experiments. It is observed that the problems arising from topography development during depth profiling with cluster projectiles can be mitigated by reducing the beam incidence angle with respect to the surface normal or increasing its kinetic energy.
Highlights
Topography development is one of the main factors limiting the quality of depth profiles during depth profiling experiments
Four test studies corresponding to the incidence angles of 30°, 35°, 45°, and 50° are performed on a silicon sample with a 10 times larger number of impacts to probe the effect of the projectile fluence on the mass transfer function dependence on the angle of incidence
We have shown that ripple formation during cluster ion beam irradiation, which we equate to surface roughening, can be explained by impact-induced mass transfer with a simple and intuitive model
Summary
Topography development is one of the main factors limiting the quality of depth profiles during depth profiling experiments. A simple model, based on a concept of mass transfer, is proposed to predict the conditions favorable for the formation of ripples on the solid surfaces bombarded by cluster projectiles. For each combination of the kinetic energy and incident angle, a series of 50 simulations are performed, which corresponds to a fluence of approximately 3 × 1012 impacts/cm[2], and the final value of the mass transfer function is calculated as an average.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
