Abstract
Using the Boltzmann approach we have developed one dimensional (1D) model of metal films conductivity for the quantum electron transport. Thickness fluctuation of film has an effect on the electron spectra via carriers scattering in quantum size regime. In the framework of the developed model size dependent conductivity of metal films has been calculated. Here, we employed above mentioned model to explain experimental data on single crystalline CoSi2 films and fine-grained gold films. Wide film thickness ranges applicable by the described model cover also the crossover from quantum to quasiclassical electron transport.
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