Abstract
Within the model of the nonlocal thermoelastic peak (NTP) of low-energy ion, the emergence of intrinsic stress in carbon coatings deposited from the flow of ions of hydrocarbon molecules is theoretically studied. The expression is obtained for intrinsic stress depending on species and ion energy. The time dependence of temperature and pressure in the NTP of CH4+, C2H2+ and C6H6+ ions was studied The position of NTP of ions of different species and energies on the P,T phase diagram of carbon was found and their trajectories were constructed. The position of the NTP trajectories of various ions with respect to the regions of structural stability of carbon was analyzed. The conditions for the predominant formation of sp3 bonds in the NTP of ion are discussed.
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