Abstract
The development of intrinsic stresses within titanium-containing hydrocarbon (Ti–C:H) nanocomposite coatings was monitored during growth by in situ substrate curvature measurements using a multibeam optical sensing technique. Stress as a function of coating thickness was measured in a wide range of specimens, from nearly pure amorphous hydrocarbon (a-C:H) to nearly pure titanium carbide (TiC). The intrinsic stress within the nanocomposite coating was found to vary significantly in magnitude, and to depend systematically on the Ti composition. The observed stress variation as a function of the Ti composition correlates well with a previously reported percolation-type transition in the coating microstructure.
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