Abstract
Reflection high energy electron diffraction (RHEED) is one of the few surface science techniques that are applied in a fabrication process, namely to monitor the epitaxial growth of ultrathin films and advanced materials. In spite of this technological relevance the multiple scattering nature of the involved scattering processes has hindered the quantitative interpretation of RHEED in the case of real, i.e. imperfect, surfaces for a long time. This article reviews recent progress in the understanding of RHEED from surfaces exhibiting various types of disorder. It concentrates on a multiple scattering formalism — based on perturbation theory with the nonperiodic part of the structure as perturbation — that allows the computation and interpretation of RHEED from real systems. The validity regime of the approach is discussed. We demonstrate the potential of the method by its application to the quantitative interpretation of experimental data. The range of treated problems comprises occupational disorder, intensity oscillations, structure of disordered metal/adsorbate systems, diffuse scattering from adatoms, Kikuchi scattering and phonon scattering.
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