Abstract

2 9Si nuclear magnetic resonance (NMR) spectra have been measured for amorphous hydrogenated silicon as well as amorphous-microcrystalline mixed-phase hydrogenated silicon using cross polarization and magic-angle sample spinning. 1H NMR spectra have been measured as well. The peak position of the 29Si signal has been found to correlate well with the line shape of the 1H NMR spectra, and mechanisms determining the position have been discussed.

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