Abstract
The effects of electron beam (EB) irradiation on spin-on glass (SOG) were investigated using thermal desorption spectroscopy. We were able to employ heat treatment as a “development process”, since we discovered that heat treatment breaks different bonds in SOG depending on whether it is applied before or after EB irradiation of SOG. In the case, when heat treatment was applied before EB irradiation of SOG, it was possible to break the Si–C bond at about 500 °C. In the case, when heat treatment was applied after EB irradiation of SOG, on the other hand, the –SiC bond could be broken at a lower temperature of about 400 °C. Using this difference between the two bond-breaking temperatures, it was possible to develop SOG using thermal desorption development (TDD). Moreover, the bond-breaking mechanisms revealed that the organic components in SOG play an important role in TDD. Hence, in order to determine the influence of organic components on TDD, the development characteristics of SOG samples with 10% and 15% organic contents were investigated.
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