Abstract
Internal Stress Tensor Determination in Molybdenum and Molybdenum-Carbon Thin Films Deposited by D.C. Magnetron Sputtering
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
https://doi.org/10.4028/www.scientific.net/msf.133-136.873
Journal: Materials Science Forum | Publication Date: Jan 1, 1993 |
Internal Stress Tensor Determination in Molybdenum and Molybdenum-Carbon Thin Films Deposited by D.C. Magnetron Sputtering
Join us for a 30 min session where you can share your feedback and ask us any queries you have