Internal Stress Development In Spin Coated Polyimide Films

Abstract

ABSTRACTThe effect of processing on the development of internal stresses in spin coated polyimide films was investigated. The internal stresses are a result of the coefficient of thermal expansion (CTE) mismatch between the polymer and the substrate. Birefringence and CTE were used to characterize the in-plane molecular orientation. In-plane orientation was shown to be sensitive to processing conditions. Increasing the spin speed results in higher in-plane orientation as observed by an increase in birefringence and a corresponding decrease in CTE. Heating rate during cure was observed to have a significant effect on in-plane orientation. Faster heating rates during cure resulted in a lower birefringence. The lower birefringence is attributed to relaxation effects that can occur during a rapid cure. The decrease in orientation was accompanied by an increase in internal stress.