Intermolecular forces and surface stress residual effects on the size-dependent performance analysis of nanocrystalline micro/nano gyroscopes

Abstract

This work investigates an electrostatically-actuated vibrating beam micro/nano-gyroscope made of nanocrystalline silicon material. The comprehensive size-dependent micro/nanogyroscope model is developed by couple stress and surface elasticity theories. Then, considering the effects of intermolecular forces (Casimir force and van der Waals force) and surface stress residual, an in-depth investigation was conducted on the performance of the micro/nanogyroscope. The calculation results display that the maximum static deflection, pull-in voltage and natural frequency change obviously with the increase of surface stress residual as the scale varies from micrometer to nanoscale. However, the effect of intermolecular forces on the performance of gyroscopes is exactly the opposite, which improves the prediction of system structural softening deformation phenomenon. Considering the influence of the Casimir and van der Waals forces in micro/nano gyroscopic system will help gyroscopes to obtain reliability and functionality sensitivity, increase the accuracy of predicting static deformation, natural frequency and differential frequency. Moreover, a frequency-domain method using the difference between the two vibration natural frequencies is studied, with changing the scale of the gyroscope under the effect of the intermolecular forces. The numerical simulations exhibit that when considering smaller structure sizes of the gyroscope, strong coupling occurs between the intermolecular forces and surface stress residual, which is helpful for the design of micro/nano gyroscopes.