Interlayer relaxation in group-III-nitride-based heterostructures according to X-Ray diffraction data

Abstract

The structure perfection in two samples of the InN-GaN bilayer heterosystem, grown by molecular beam epitaxy (MBE) and metalorganic vapor phase epitaxy (MOVPE) on (0001)-oriented sapphire substrates, has been studied by the X-Ray diffraction techniques. Components of the microdistortion tensor were determined from an analysis of the broadening of diffraction peaks measured in various geometries. These data were used to evaluate the densities of various dislocation families in each layer of the heterosystem and to trace a change in the dislocated structure from the lower (GaN) to upper (InN) layer. A difference in the behavior of dislocations in the two samples grown by different methods (MBE versus MOVPE) suggests that different mechanisms of relaxation of the elastic stresses between InN and GaN layers are operative in these cases.