Abstract
We describe a method that uses coherent Gaussian illumination for the interferometric measurement of roughness and shape of flat optical surfaces. This method allows varying the size of the area under examination of the surface under test without changing any components in the setup. For this, it is only necessary to adjust the position of one of the illuminating lenses of the system. Once the setup has been assembled, additional optical components are not necessary for examining different object areas; thus, diffraction effects that would be introduced by including additional components are avoided. A calculation of the diffraction due to the propagation of the beams through the system is presented to evaluate the precision of the method. For illustrative purposes the measurement of two different areas of an optical flat using a Michelson-type setup is presented.
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