Abstract
A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mirror, was utilized to achieve system compactness. Based on the Wiener–Khinchin theorem, an accurate EUV spectrum was obtained by numerically analyzing the measured signal autocorrelation without performing wavelength calibration. The achieved spectral resolution of 30 pm was comparable to those of flat-field spectrometers. Various high-oxidation states of Sn and the residual O in the vacuum chamber were also successfully identified.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
