Abstract

Two measuring methods of the plane diffraction grating spacing error are presented in this work. The first one resembles real- time holographic interferometry. The hologram is exposed when an object beam is the nth diffraction order, and is then illuminated by the - nth diffraction order wave. The second method makes use of double-exposure holographic interferometry. The first exposure is performed when the nth diffraction order is an object beam. During the second exposure the - nth diffraction order is an object beam. Both methods allow to measure the spacing error separately, not only from the grating surface error but also from the aberrations introduced by the other optical elements of the set-up.

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