Abstract
Interferometric methods are widely used in surface metrology. A question that arises is how much information about the surface can be extracted from a given interferogram. For examination of the resolution limit of interferometry with coherent monochromatic light, interferograms of several surface relief gratings calculated with the use of approximate and rigorous theories are presented. The limits of the usefulness of scalar theory based on the use of the Fourier transform are indicated. Interferograms of dielectric and metallic structures are examined, including simple lamellar gratings and gratings made up of trapezoidal steps with varying slopes and depths. In all cases TE illumination is assumed. The effects of changing numerical aperture and defocus on the interferograms are also examined.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
