Abstract
Abstract The gradual deformation of a melted photoresist pre-form as it changes to the final microlens surface shape is monitored by an adapted Mach-Zehnder interferometer. This set-up makes it possible to record a continuous set of interferograms from which the microlens surface evolution can be determined. The loss of volume produced in the first steps of melting as well as the progressive changes in curvature and spherical aberration of the refracted wave front are evaluated.
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