Interference suppression strategies for trace minor component of semiconductor gas sensor based on temperature modulation mode

Abstract

Complex target gas environment containing trace minor components has strong interference to the detection results of gas sensing. In this paper, the performance degradation caused by minor components was solved by studying the microscopic characteristics related to gas sensitivity and response curve error in the time domain. By mastering the microscopic characteristics of gas sensitivity, cooling time domain was selected by sub-sensitivity characteristics to enhance recognition effect of the main components and to minimize the influence of minor components on the response. By mastering the microscopic characteristics of the response curve error, high temperature time domain was selected, which had a high tolerance to the error caused by the minor components. The anti-interference time domain was located synthetically based on these two time domains. Meanwhile, the rationality of this method was analyzed from the view of the gas-sensing characteristic and response curve error of dynamic response. Finally, the decision tree algorithm was used to verify the feasibility of this partition method. The proposed method can effectively solve the interference of trace minor component gas in the detection process, which is conducive to the expansion of the application of semiconductor sensor in the complex gas environment.