Abstract
The development of biosensors for in vivo applications requires the deposition of metallic contacts on biofunctionalized, biocompatible surfaces. For improved performance the metallic contacts should not interfere with the biosensing zone of the sensors. Owing to their biological compatibility with human tissues and fluids, diamond, titanium and silicon nitride ceramics (Si3N4) are potential candidates to be incorporated in implantable biosensors. The easy formation of titanium carbide under carbon saturated atmospheres, make titanium the right choice for diamond nucleation and growth. The same applies to the well studied Si3N4 ceramics used as substrates for diamond growth. The fabrication of biocompatible ceramic substrates with incorporated titanium contacts and chemically vapour deposited low resistivity boron doped diamond surfaces is the aim of the present work.
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