Interfacial diffusion behavior in Ni-BaTiO 3 MLCCs with ultra-thin active layers

Abstract

The interfacial structure and diffusion behavior between the dielectric layers (BaTiO3) and internal electrode layers (Ni) in X5R-type multilayer ceramic capacitors (MLCCs, from −55°C to 85°C, at a temperature capacitance coefficient within ±15%) with ultra-thin active layers (T = 1–3 µm) have been investigated by several microstructural techniques (SEM/TEM/HRTEM) with energy-dispersive x-ray spectroscopy (EDS). In the MLCC samples with different active layer thicknesses (1–3 µm), weak interfacial diffusion was observed between BaTiO3 and Ni. It was also found that the diffusion capability of Ni into the BaTiO3 layer was stronger than that of BaTiO3 to the Ni electrode, which indicated that the diffusion of Ni was the dominant factor for the interfacial diffusion behavior in the ultra-thin layered MLCCs. The mechanism of Ni diffusion is discussed in this study as well.