Abstract
As computer controlled instruments for surface analysis are in common use for many years, the problem of exchangeability of analytical data has attracted interest in the surface analysis community. More and more examples for the development of standarized data formats as the VAMAS format [1] and the Standard for Chromatography Data Communication from the AIA [2] have been published. There are a few attempts to establish standardized “data dictionaries” e.g. the parameter lists describing AES and XPS spectra pusblished in Surface Science Spectra [3, 4]. If several different analysis methods (such as AES, SAM, XPS, SIMS, STM, AFM, EPMA, …) are applied to the same sample, a quite independent and open approach is needed to be able to combine data of various instruments in a common data evaluation procedure. It could be the basic concept of real mutli-method analysis. The public domain software package MAXMIND has been developed, as only a standardized data exchange and storage format based on data dictionaries can guarantee a high level of independence of proprietary measurement systems.
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