Interface study of transition metal (Fe, Zr) on 4H–SiC(0 0 0 1)Si face: photoemission electron microscopy and soft X-ray fluorescence spectroscopy

Abstract

We have studied interface electronic structure of transition metal film (Fe, Zr)/4H–SiC (substrate) contact systems by using a photoemission electron microscopy (PEEM) and a soft X-ray fluorescence spectroscopy (SXFS). PEEM can show surface micro- and/or nano-structures, whereas SXFS can tell details of chemical bonding states. For specimens of Fe(10 nm)/4H–SiC(0 0 0 1)Si face contact system annealed at 300–900 °C, PEEM images have shown dramatic change in surface morphology above 550 °C, where the Si L 2,3 fluorescence spectra can be explained by considering formation of iron silicides. On the other hand, PEEM images and the Si L 2,3 fluorescence spectra for specimens of Zr(film)/4H–SiC(0 0 0 1)Si face contact system annealed at 650–1100 °C have indicated that interfaces of specimens are stable up to 1100 °C without any reaction.