Abstract
In this paper, limitations of the Schottky Capacitance Spectroscopy (SCS) method are discussed and modifications of the method for low forward bias and high frequency are proposed. It is shown that simplifications commonly accepted in the SCS method can lead to erroneous conclusions as to the cut-off frequency and hence the interface states parameters. A modified SCS method is used in the interface states capacitance measurements in AuPtTi nGaAs Schottky diodes.
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