Abstract
Anodic bonding is a process for bonding metal to ion-conductive glass at a temperature below the glass softening point, where a direct current voltage is applied to the metal and glass with an anode and cathode, respectively. The bond interface was not immediately separated when opposite polarity was applied to anodically bonded Kovar alloy–borosilicate glass, however, the bond interface was separated after long-term exposure to air. Given that the bond interface was not changed after exposure to vacuum, it was suggested that water in the air caused interface separation. When opposite polarity was applied to the bonded joint, the concentrations of Na and Si in water after a water immersion test increased when compared with tests that did not use opposite polarity. Thus, it was considered that the water-soluble sodium silicate layer, which was formed in the bond interface by the application of opposite polarity, eluted into the water to cause interface separation.
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