Interface Science, Its Impact on Modern Semiconductor Technology and Device Physics

Abstract

Modern semiconductor technology and device physics are intimately linked with the developement of surface and interface science. This has historical reasons but is also due to the fact that higher and higher miniaturisation leads to more and more interface region as the important active part in a modern heterostructure device. This intimate relation between both science branches is demonstrated by some recent examples of research work covering different topics as semiconductor epitaxy, band-offsets in heterostructures, interface potential, self-organized growth of quantum dots and the biology/microelectronics interface.