Interface Oxidative Structural Transitions in Graphene Growth on SiC (0001)

Abstract

The structural transition from a three-dimensional SiC lattice to a two-dimensional graphene sheet is a crucial element in the growth mechanism of graphene on SiC. An interfacial defective transition layer near the surface of the SiC substrate is believed to be an intermediate structure for graphene layer formation. The transition layer consists of SiOxCy, vacancies, and other defects in the SiC lattice, which result from Si evaporation via thermal degradation of the SiC lattice and oxidation reactions of residual oxygen and other oxygen containing molecules on the SiC surface at high temperatures. This partially oxidized and structurally degraded SiC lattice layer is formed at temperatures lower than the graphene growth temperature but then decomposes with increasing temperature, leading to graphene formation. Then, the growth mechanism for graphene on SiC (0001) in high vacuum consists of multiple steps, including Si removal by thermal decomposition and oxidation, collapsing of the near surface SiC latt...