Interest of Rapid thermal annealing (RTA) for the elaboration of SnO2:Sb Transparent Conducting Oxide by the Sol-Gel technique

Abstract

Transparent Conducting Oxide (TCO) films of Sb doped SnO2 have been successfully elaborated by us using the Sol-Gel Dip Coating (SGDC) technique. Good conductive and optical properties of such films depend on the densification and crystallisation of the SGDC deposits, which can be achieved by classical thermal procedures but such procedures are time consuming in case of multilayered films. Here are presented results of Rapid Thermal Annealing (RTA) of these films, which lead to good conductive properties even in the case of monolayered films.