Abstract

The aerodynamic lubrication performance of gas microbearing has a particularly critical impact on the stability of the bearing-rotor system in micromachines. Based on the Duwensee’s slip correction model and the fractal geometry theory, the interactive effects of gas rarefaction and surface roughness on the static and dynamic characteristics were investigated under various operation conditions and structure parameters. The modified Reynolds equation, which governs the gas film pressure distribution in rough bearing, is solved by employing the partial derivative method. The results show that high values of the eccentricity ratio and bearing number tend to increase the principal stiffness coefficients significantly, and the fractal roughness surface considerably affects the ultra-thin film damping characteristics compared to smooth surface bearing.

Highlights

  • The microfluidic devices are widely used in many applications such as ultra-precision machine tool spindles, inertial navigation system (INS), medical devices, and hard disk drives (HDDs) in micro-electro-mechanical systems (MEMS)

  • On the basis of fractal geometry theory and the Boltzmann slip correction factor, the combined effects of gas rarefaction and surface roughness on the static and dynamic characteristics of ultra-thin film gas lubrication in journal microbearings are investigated in detail

  • Based on the results mentioned in previous section, the following conclusions have been drawn: 1. Surface roughness and gaseous rarefaction effects are of great importance to the lubrication performance of gas journal microbearings

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Summary

Introduction

The microfluidic devices are widely used in many applications such as ultra-precision machine tool spindles, inertial navigation system (INS), medical devices, and hard disk drives (HDDs) in micro-electro-mechanical systems (MEMS). In order to account for the effect of surface roughness, Christensen and Tønder [13,14] presented a stochastic model of hydrodynamic lubrication for finite width journal bearing in which they considered the lubricant film thickness as a stochastic process. Turaga et al [20] proposed the stochastic finite method to solve Reynolds equation and obtained the static and dynamic performance of hydrodynamic journal bearings with the longitudinal, transverse and isotropic roughness pattern. Zhang et al [22,23] presented the modified Reynolds equation by including fractal roughness effect and velocity slip boundary condition and concluded that the flow behaviors in gas-lubricated journal microbearings was appreciably affected by Knudsen number, bearing number and fractal dimension. The work is expected to elucidate the performance characteristics of gas microbearings with Poiseuille flow and random asperities, which is conducive to understand the fluid mechanisms of very low clearance gas films for microfluidics devices

Characterization of Fractal Rough Surface
Numerical
H number
Results and Discussion
Steady-State Film Pressure
Comparison of of dimensionless gasgas film pressure with
Load-Carry Capacity and Friction Coefficient
G Non-dimensional
Dynamic and Damping Coefficients
Conclusions

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