Abstract
BCN-layers were deposited in a hot-filament supported reactor using the single source precursor tris(dimetylamino)boran. These experiments were strongly influenced by the stability of the Ta-filament. At filament temperatures of 1500 °C layer deposition on the surface of the filament takes place, at temperatures higher than 2000 °C liquid phase formation led to filament breakdown in many cases. Therefore protection of the filament is necessary to increase the stability of the filament against the precursor. This can be done by nitridation or carburisation prior to the deposition experiments. During filament nitridation a strong temperature drop occurred because of a volume increase of the Ta due to dissolving nitrogen. The morphology of the deposited BCN layers on hard metal substrates depends on the deposition conditions and mostly contain high amounts of tantalum (BCN-Ta layers).
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