Abstract
For some applications, piezoelectric (Pb,La)(Ti,Zr)O 3 solid solution (PLZT) thick films are screen-printed and fired on platinum-metallized Al 2O 3 substrates. In this work, the compatibility and adhesion between PLZT thick films, the thick film platinum electrode, and the alumina substrate was investigated. Microanalysis of PLZT/Pt/Al 2O 3 structures after the firing process showed a secondary phase with β-Al 2O 3 structure at the interface between Pt and Al 2O 3, with a nominal composition of PbAl 12O 19, doped with La 2O 3 and TiO 2 from PLZT and partly with oxides originating from impurities in alumina (CaO and MgO). As this compound could not be synthesized from pure oxides the results indicate that the other oxides are needed to promote the formation of a β-Al 2O 3 type compound. The formation of this compound results in significantly decreased adhesion between the PLZT/Pt layer and the alumina substrate.
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