Abstract
Despite the potential technological applications of ion beam-polymer interaction (e.g. lithography, adhesion enhancement, conducting polymers) there has been little study, to date, of the chemical changes which take place when ion beams modify polymeric structures. Recently, SIMS has emerged as a powerful tool for the analysis of organic surfaces. Understanding the rate and form of ‘damage’ effects is an important aspect of the development of the technique. Thus ‘static’ SIMS is the ideal method for studying the interaction of low energy ion beams with polymers. This paper will discuss progress in the study of the interaction of 2–10 keV ion beams with polymers, principally PMMA, in the dose regime 10 12–10 15 ions cm −2.
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