Interaction between BTI and HCI degradation in High-K devices

Abstract

In this paper we review experiments combining several types of FET devices degradation modes, including HCI, bias and unbiased BTI. We analyze the nature and localization of defect issued from these degradation processes and derive rules governing interaction between defect generation process, drain polarization dependency on BTI degradation as well as potential BTI contribution to HCI degradation. Consequences of BTI - HCI interaction on WLR analysis as well as product operation will be discussed.