Intensity measurement of surface diffraction spots by EELS

Abstract

With the development of the modern ultra-high vacuum (UHV) transmission electron microscopes, it has become possible to study the surfaces of various materials in a clean environment. Transmission electron diffraction in a plan view geometry is particularly powerful in solving the surface atomic structures, for example Si(111)-7x7. Surface diffraction spots in such a pattern are usually quite strong, readily apparent on a phosphor screen. In addition, these spots are much clearer in an off zone diffraction pattern. This paper presents the absolute intensity measurement of the surface spots intensity using an electron energy loss spectrometer.