Abstract

The soft X-ray spectra in 0.1-1.6 ke V range from a 0.53 μm-wavelength-laser produced gold plasmas are obtained experimentally at 0.1-1.0 nsec pulse with the intensities of 1012-1015 w/cm2. The spectra are found to deviate from a simple blackbody radiation spectrum profile. Their soft X-ray conversion efficiencies are obtained as a function of the laser intensity. Atomic number dependence of the soft X-ray conversion efficiency is obtained systematically at sub-ke V range for the first time and it is found to have an undulatory structure.Application of laser generated X-ray to X-ray lithography is discussed and its feasibility is estimated.

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