Abstract
This paper presents the development of an intelligent high temperature sensor to be used in hostile environment critical industrial applications. The temperature sensing element is a Schottky diode fabricated on 4H-SiC wafers, with Ni as the Schottky metal, which allows operation at temperatures up to 250°C. It represents a reliable alternative to low-lifespan conventional solutions, such as thermocouples. High accuracy is demonstrated by simulations and measurements in the 25-250°C domain with errors lower than 1%, related to the temperature range of interest. The sensor's output voltage has improved sensitivity and good linearity, while the readout circuit can be calibrated for linear response over a tunable temperature detection range.
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