Intelligence rules of hysteresis in the feedforward trajectory control of piezoelectrically-driven nanostagers

Abstract

Piezoelectrically-driven nanostagers have limited performance in a variety of feedforward and feedback positioning applications because of their nonlinear hysteretic response to input voltage. The hysteresis phenomenon is well known for its complex and multi-path behavior. To realize the underlying physics of this phenomenon and to develop an efficient compensation strategy, the intelligence properties of hysteresis with the effects of non-local memories are discussed here. Through performing a set of experiments on a piezoelectrically-driven nanostager with a high resolution capacitive position sensor, it is shown that for the precise prediction of the hysteresis path, certain memory units are required to store the previous hysteresis trajectory data. Based on the experimental observations, a constitutive memory-based mathematical modeling framework is developed and trained for the precise prediction of the hysteresis path for arbitrarily assigned input profiles. Using the inverse hysteresis model, a feedforward control strategy is then developed and implemented on the nanostager to compensate for the ever-present nonlinearity. Experimental results demonstrate that the controller remarkably eliminates the nonlinear effect, if memory units are sufficiently chosen for the inverse model.