Integration of on-chip field-effect transistor switches with dopantless Si/SiGe quantum dots for high-throughput testing

Abstract

Measuring multiple quantum devices on a single chip increases characterization throughput and enables testing of device repeatability, process yield, and systematic variations in device design. We present a method that uses on-chip field-effect transistor switches to enable multiplexed cryogenic measurements of double quantum dot Si/SiGe devices. Multiplexing enables the characterization of a number of devices that scales exponentially with the number of external wires, a key capability given the significant constraints on cryostat wiring. Using this approach, we characterize three quantum-point contact channels and compare threshold voltages for accumulation and pinch-off voltages during a single cool-down of a dilution refrigerator.