Abstract
Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a pass transistor to control the state of the relay. Silicon MOSFET-NEM relay integration opens up the possibility for applications, where the zero off-state leakage, the sharp on/off transition, and/or the hysteresis of the NEM relay can be used to complement the capabilities of CMOS.
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