Integration of microfluidic system with silicon nanowires biosensor for multiplexed detection

Abstract

This paper propose a novel method of integration microfluidic sample delivery system with silicon nanowire (SiNW) biosensor device, which provide multiplexed detection capability as well as protect the fragile sensing elements from mechanical shocks and surrounding impurities. The SiNWs and PDMS chips were fabricated with complementary metal oxide semiconductor (CMOS) compatibility and low cost methods. They were integrated together by using optimal O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> plasma parameters that enabled rapid and leakage-free bond formation, without additional heating or applied pressure. Capillary action enabled by the hydrophilicity of the channels using polyvinylpyrrolidone (PVP) was also demonstrated to allow analyte solution delivery onto the sensor array directly, exclude the need of using external pumping devices.