Abstract
This paper describes the experimental verification of the novel IMT-PTB microprobe combined with a uniquely designed microenvironment. The microprobe consists of three silicon-based parallelograms stacked orthogonally, which leads to high isotropy. The probe tip deflections are detected in 3D with the help of piezoresistors placed in the parallelograms. The microenvironment facilitates and improves the measurement of workpieces with sub-millimeter features. The new microprobe and the microenvironment were integrated into a commercial coordinate measuring machine (CMM). To evaluate the microprobe performance, PTB produced and calibrated three reference objects: a cube, a sphere, and a microgear measurement standard. The differences between the calibration values and the measurement results obtained by the microprobe were in the sub-micrometer range. Furthermore, the microprobe was compared with the standard probing system of the gear measuring machine by measuring the reference objects with identical parameters. The results show the excellent performance of the micro probing system, thereby extending the capability of the CMM for high-precision measurements of complex workpieces at the microscale.
Highlights
Workpieces with sub-millimeter features are vital components in many industrial products
This paper describes the experimental verification of the novel IMT-PTB microprobe combined with a uniquely designed microenvironment
The new microprobe and the microenvironment were integrated into a commercial coordinate measuring machine (CMM)
Summary
Workpieces with sub-millimeter features are vital components in many industrial products. A complete micro coordinate metrology solution for a conventional CMM is proposed; integration of a new IMT-PTB microprobe (developed in collaboration of the Institute of Microtechnology with Physikalisch-Technische Bundesanstalt) and a microenvironment, both allowing and facilitating micromeasurements on the Klingelnberg P40 To verify this solution, measurements were performed on calibrated reference objects and compared. The proposed construction composed of three silicon parallelograms stacked orthogonally provides isotropic kinematics with large measuring ranges, little stiffness, and high sensitivity due to piezoresistors in doped monocrystalline silicon used as sensors This novel IMT-PTB microprobe, contained in a Ø 11 mm housing, is a first siliconbased miniaturization of the probing system based on a three parallelogram construction proposed by Zeiss in 1973 [1] or of the microprobe proposed by METAS [3, 13].
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