Integration of a Micro-Temperature Sensor on a Silicon-Based Micro-Reformer

Abstract

Micro-reformers have become increasingly important to advances in the production of hydrogen; but some of the problems associated with them, such as reducing their size, reducing the quantity of CO, and combining the fuel cell among others are yet to be solved. A micro-temperature sensor integrated inside a silicon-based micro-reformer is used to measure temperature and thus improve performance and minimize the concentration of CO. The reaction inside the micro-reformer must be controlled and adjusted in real time. In this work, micro-channels and micro-temperature sensors were fabricated onto a silicon substrate by micro-electro-mechanical systems (MEMS) fabrication technique. The micro-temperature sensors are placed in different positions inside the micro-reformer. The major advantages of the temperature sensors are its high accuracy and sensitivity and its ability to measure temperature inside a silicon-based micro-reformer. The experimental results demonstrate that the resistance was linearly related to the temperature. As the result, the measured thermal range from 30°C to 310°C was noted, the accuracy and sensitivity were 0.5°C and 1.162 × 10−3/°C, respectively.