Abstract
Both approaches have strengths and weaknesses. The SEM's strength is to quickly generate images with a large range of magnifications, making it easy to locate the area of interest. However, it doesn't yield 3D information, e.g. invisible contamination layers. The AFM's main advantage is its ability to obtain 3D information, the downsides are that it is hard to find the target area and image generation is slow. Combining these two tools into one setup putting an AFM inside an SEM gives quick access to a more complete data set. Additionally, FIB-milled or FIB-deposited structures can be characterized using this combination of tools in a FIB/SEM system.
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