Abstract
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.
Highlights
Micro-Electro-Mechanical Systems (MEMS) or microsystems, are micro-sized devices nowadays largely used in the consumer and automotive market
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously
Some interesting proposals exist of multi-axial inertial sensors with a single proof mass: in [4] a five-axis sensor (3-axis accelerometer and 2-axis gyroscope) with capacitive detection was fabricated using silicon bulk micromachining; in [5] a six-axis vortex sensor (3-axis accelerometer and 3-axis gyroscope) with piezo-resistive detection was proposed
Summary
Micro-Electro-Mechanical Systems (MEMS) or microsystems, are micro-sized devices (see e.g. [1, 2]) nowadays largely used in the consumer and automotive market. By means of the flexural resonator elements, the integrated detection structure enables differential detection of an angular velocity acting about an out-of-plane direction, the yaw angular velocity Ωz, and of a linear acceleration ay along the y-axis.
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