Abstract
We present in this paper an integrated cavity-backed patch antenna operating at 75 GHz. The design was optimized using a full-wave software based on the integral-equation method. The antenna was realized using micromachining technologies on two wafers: a silicon one supporting a membrane and a radiating patch, and a Pyrex one constituting the feeding element. The measurements are in good agreement with the theoretical predictions. © 2000 John Wiley & Sons, Inc. Microwave Opt Technol Lett 26: 298–302, 2000.
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