Abstract
Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertainty of the displacement measurement has a larger influence on the total height uncertainty than the uncertainty of the displacing motion itself. Secondly, a sufficiently precise displacement measurement by means of digital speckle correlation (DSC) is proposed that is fully integrated into the field of view of the interferometer. In contrast to externally applied displacement measurement systems, the integrated combination of DSC with LSWLI needs no synchronization and calibration, and it is applicable for translatory as well as rotatory scans. To demonstrate the findings, an LSWLI setup with integrated DSC measurements is realized and tested on a rotating cylindrical object with a surface made of a linear encoder strip.
Highlights
IntroductionRising demands regarding the quality of optically smooth surfaces of consumer goods and industrial intermediate products necessitate metrology that is able to quantify the topography of these surfaces in a quick and accurate manner
The height uncertainty u(h12 ) calculated with the Monte Carlo simulation is presented in Figure 5 for different levels of the motion uncertainty u(xmotion ) and the displacement measurement uncertainty u(xmeasurement ) over the distance of the field of view to the apex of the circular scan path
The article aimed to propose an integrated displacement measurement system for Lateral scanning white light interferometry (LSWLI) that allows for topography measurements on continuously rotating objects
Summary
Rising demands regarding the quality of optically smooth surfaces of consumer goods and industrial intermediate products necessitate metrology that is able to quantify the topography of these surfaces in a quick and accurate manner. Systems capable of inprocess measurements are especially interesting for manufacturers, as early detection of defects reduces production costs [1,2]. For delicate surfaces, such as optical components or highly reflective functional and decorative surfaces, a contactless method for topography measurement is desired. Many manufacturing processes involve continuously moving, rotating materials or tools, such as the rolling of sheet metal. A strong demand for precise topography measurements on curved surfaces of continuously rotating objects exists
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