Abstract
A smart sensor has been developed for the measurements of both flow direction and velocity. The sensor uses a thermal principle, which allows complete integration together with electronic circuitry on one chip. A groove is etched to create thermal isolation between the sensor and the chip edge to obtain an essential variable (the flow temperature). On the edge a voltage-to-frequency (V/f) converter is placed as a first step towards a digital output. The V/f converter is able to convert voltages in the range of 1 μV to 1 mV. The frequency output signal is a direct measure for the wind velocity. The presence of a multiplexer enables direction measurement and calibration of the sensor.
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