Abstract
A semiconductor-based sensor array has been developed for highly toxic gas analysis in atmospheres with low oxygen content and in the presence of humidity and corrosive gases. The device consists of 16 discrete sensing elements formed by tin oxide thin layers deposited by sputtering. The sensor array was exposed to a gas mixture formed by N 2, O 2, CO 2, H 2S, HF, HCl and water vapour with a constant flow rate of 500 ml min −1. Once their electric resistance at different temperatures between 150°C and 350°C was stabilized, the response to polluting gases coming from combustion processes (NO x, SO 2, C 6H 6) was studied.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
