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Abstract
Integrated optical phased arrays can be used for beam shaping and steering with a small footprint, lightweight, high mechanical stability, low price, and high-yield, benefiting from the mature CMOS-compatible fabrication. This paper reviews the development of integrated optical phased arrays in recent years. The principles, building blocks, and configurations of integrated optical phased arrays for beam forming and steering are presented. Various material platforms can be used to build integrated optical phased arrays, e.g., silicon photonics platforms, III/V platforms, and III–V/silicon hybrid platforms. Integrated optical phased arrays can be implemented in the visible, near-infrared, and mid-infrared spectral ranges. The main performance parameters, such as field of view, beamwidth, sidelobe suppression, modulation speed, power consumption, scalability, and so on, are discussed in detail. Some of the typical applications of integrated optical phased arrays, such as free-space communication, light detection and ranging, imaging, and biological sensing, are shown, with future perspectives provided at the end.
Highlights
In recent years, optical phased arrays (OPAs) have attracted a great deal of attention.At optical wavelengths, small diffraction angles for a given aperture size can be achieved, compared with microwave radar systems
We focus our attention on the material platforms of integrated OPAs (Section 5)
Integrated photonics paves the way for low-cost large-scale OPA chips
Summary
Optical phased arrays (OPAs) have attracted a great deal of attention. They require a complex assembly and calibration process, causing a greatly high unit cost. These mechanical approaches are only capable of steering a single light beam. CMOS-compatible all-dielectric silicon (Si)-based metasurface enabled beam steering with high transmission for wavelengths ranging from. The non-mechanical beam steering based on an integrated OPA offers better gration [17,19,45]. The non-mechanical beam steering based on an integrated OPA offers reliability and reconfigurability.
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