Integrated optical design for highly dynamic laser beam shaping with membrane deformable mirrors

Abstract

The utilization of membrane deformable mirrors has raised its importance in laser materials processing since they enable the generation of highly spatial and temporal dynamic intensity distributions for a wide field of applications. To take full advantage of these devices for beam shaping, the huge amount of degrees of freedom has to be considered and optimized already within the early stage of the optical design. Since the functionality of commercial available ray-tracing software has been mainly specialized on geometric dependencies and their optimization within constraints, the complex system characteristics of deformable mirrors cannot be sufficiently taken into account yet. The main reasons are the electromechanical interdependencies of electrostatic membrane deformable mirrors, namely saturation and mechanical clamping, that result in non-linear deformation. This motivates the development of an integrative design methodology. The functionality of the ray-tracing program ZEMAX is extended with a model of an electrostatic membrane mirror. This model is based on experimentally determined influence functions. Furthermore, software routines are derived and integrated that allow for the compilation of optimization criteria for the most relevant analytically describable beam shaping problems. In this way, internal optimization routines can be applied for computing the appropriate membrane deflection of the deformable mirror as well as for the parametrization of static optical components. The experimental verification of simulated intensity distributions demonstrates that the beam shaping properties can be predicted with a high degree of reliability and precision.